Optical device with a groove accurately formed

Details Optical device with a groove accurately formed Optical device with a groove accurately formed

1999-07-28

2000-08-22

Lee, John D.

Optical waveguides

Planar optical waveguide

385 49, G02B 6136

Patent

active

061084808

ABSTRACT:
A first layer (2) and a second layer (3) are formed on a substrate (1). The first layer is made of a resist against a groove-sculpturing etchant used in etching the substrate while the second layer is made of an anti-corrosive material against dry etching. The second layer is at first patterned into a patterned second layer (3a) in the form of a groove-sculpturing mask pattern (8). With the patterned second layer used as a mask, the first layer is etched and patterned into a patterned first layer (2a) in the form of the above-mentioned mask pattern. With the patterned first layer used as a mask, the substrate is etched to form a groove (9).

REFERENCES:
patent: 5355386 (1994-10-01), Rothman et al.
patent: 5471552 (1995-11-01), Wuu et al.
patent: 5481629 (1996-01-01), Tabuchi
patent: 5499732 (1996-03-01), Nishimoto
patent: 5557695 (1996-09-01), Yamane et al.
patent: 5579424 (1996-11-01), Schneider
patent: 5644667 (1997-07-01), Tabuchi

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