Optical device including a grating

Optical waveguides – With optical coupler – Particular coupling structure

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357 16, 357 59, 385 37, H01L 2714

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active

050757490

ABSTRACT:
Substrate-supported optical device structures such as, e.g., quantum-well infrared detectors/detector arrays are provided with a grating for optical coupling. Preferred gratings are formed in a nonepitaxial layer which, preferably, consists of a material which is different from underlying semiconductor material. Conveniently, a grating pattern is formed by etching, with the underlying material serving as an etch stop. For example, on a GaAs--AlGaAs device, polycrystalline silicon can be deposited and etched in this fashion.

REFERENCES:
patent: 4038606 (1977-07-01), Hoeberechts et al.
patent: 4990999 (1991-02-01), Oishi et al.
"Grating enhanced quantum well detector," K. W. Goossen and S. A. Lyon, Appl. Phys. Lett. 47, Dec. 15, 1985, pp. 1257-1259.
"Strong 8.2 .mu.m infrared intersubband absorption in doped GaAs/AlAs quantum well waveguides," B. F. Levine et al., Appl. Phys. Lett. 50, Feb. 2, 1987, pp. 273-275.
"Grating enhancement of quantum well detector response," K. W. Goossen and S. A. Lyon, Appl. Phys. Lett. 53, Sep. 19, 1988, pp. 1027-1029.

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