Optical device for the alignment of two superimposed objects

Details Optical device for the alignment of two superimposed objects Optical device for the alignment of two superimposed objects

1978-01-17

1979-09-11

Nelms, David C.

Optics: measuring and testing

By alignment in lateral direction

With registration indicia

356399, 250548, G01N 2130

Patent

active

041676777

ABSTRACT:
This invention provides an optical device for detecting the position of a second mark relative to a first mark by optically scanning the first and second marks on a scanning surface. The first and second marks are scanned by a scanning spot light and the reflecting lights from the first and second marks are detected by a photoelectric detector. The relative positions of the first and second marks are computed on the basis of the detected signals.

REFERENCES:
patent: 3796497 (1974-03-01), Mathisen et al.
patent: 3865483 (1975-02-01), Wojcik
patent: 3867038 (1975-02-01), Westell

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