Optical device for measuring surface shape

Details Optical device for measuring surface shape Optical device for measuring surface shape

1993-06-18

1996-01-02

Limanek, Robert P.

Optics: measuring and testing

By polarized light examination

With birefringent element

356349, G01B 1100, G01B 902

Patent

active

054813603

ABSTRACT:
A device capable of simultaneously measuring vertical hight of shapes and surface shape characteristics of an object, maintaining high precision. An acousto-optical element generates two beams of different frequencies of which the intensity distribution can be freely controlled. The optical device is provided with an optical heterodyne interference function and a cofocal scanning microscope function, and the extrasurface shape is measured by detecting the phase of a reflected light signal and the intrasurface shape is measured by detecting the cofocal point of a reflected light intensity signal. The extrasurface and intrasurface shapes can be simultaneously measured maintaining high precision in real time. The two beams used as probe light are little affected by vibration, etc., and make it possible to obtain stable measurement. The reflected light signal needs be simply processed using a small and cheaply constructed device which lends itself well to in-line measurement in production lines.

REFERENCES:
patent: 4145758 (1979-03-01), Drexler et al.
patent: 4577967 (1986-03-01), Fujita
patent: 4650330 (1987-03-01), Fujita
patent: 4660983 (1987-04-01), Yamamoto et al.
patent: 4994990 (1991-02-01), Fujita et al.
"Precise Gap Figure Measurement Method Using Laser Heterodyne Interferometry with Two-Beam Scanning", Hiroo Fujita, Kogaku, vol. 22, No. 2, Nov. 1992, pp. 105-111.

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