Stock material or miscellaneous articles – Structurally defined web or sheet – Including variation in thickness
Patent
1992-06-05
1994-08-23
Loney, Donald J.
Stock material or miscellaneous articles
Structurally defined web or sheet
Including variation in thickness
428172, 428212, 430 5, 430321, 359 34, 359290, 359321, 359569, 359575, B32B 328, G03C 500, G02B 2742
Patent
active
053406370
ABSTRACT:
A method of fabricating diffraction gratings wherein a photomask is arranged on a substrate which is coated with a photoresist, light is to be incident thereupon at an acute angle relative to the normal direction of the photomask, and a bright/dark pattern is formed on said photoresist by the interference of the transmission light that has passed through the photomask and the diffraction light. The invention further deals with a photomask used for the above method.
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Harada Tatsuo
Hirao Motohisa
Kita Toshiaki
Matsumura Hiroyoshi
Ohishi Akio
Hitachi , Ltd.
Loney Donald J.
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