Optics: measuring and testing – By light interference – For dimensional measurement
Reexamination Certificate
2011-03-29
2011-03-29
Lyons, Michael A (Department: 2877)
Optics: measuring and testing
By light interference
For dimensional measurement
C356S477000
Reexamination Certificate
active
07916306
ABSTRACT:
The present invention provides an optical device, comprising an optical fiber and a cantilever that is arranged on an end of the optical fiber; The cantilever may be an integral part of the optical fiber, and may have a length that is substantially equal to a diameter of the optical fiber. Measurement means for measuring a displacement of the cantilever are connected to an opposite end of the, optical fiber. A method of measuring a displacement using the optical device comprises the steps of: —arranging measurement means, comprising a light source, on an opposite end of the optical fiber; —using the light source to send a beam of light into the optical fiber; —measuring the interference of light that is reflected on the end op the optical fiber and light that is reflected on the cantilever; and determining the displacement of the cantilever relative to an intermediate position dependent on the measured interference.
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Deladi Szablocs
Elwenspoek Michael Curt
Iannuzzi Davide
Hoffmann & Baron , LLP
Lyons Michael A
Universiteit Twente
Vereniging Voor Christelijk Hoger Onderwijs Wetenschappelijk Ond
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