Optics: measuring and testing – By alignment in lateral direction – With light detector
Patent
1987-09-04
1989-05-16
Rosenberger, Richard A.
Optics: measuring and testing
By alignment in lateral direction
With light detector
356401, G01B 1100, G02B 1322
Patent
active
048304999
ABSTRACT:
An optical device includes an objective lens, a relay lens group for relaying the beam from the objective lens, and a compensator for compensating the variation in the optical path length, which occurs when the relative position between said objective lens and said relay lens group changes, by expanding or contracting the optical path.
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patent: 4294538 (1981-10-01), Ban
patent: 4402596 (1983-10-01), Kanatani
Ina Hideki
Kohno Michio
Suzuki Akiyoshi
Canon Kabushiki Kaisha
Rosenberger Richard A.
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