Optical device and production method thereof

Details Optical device and production method thereof Optical device and production method thereof

2006-10-10

2006-10-10

Pak, Sung (Department: 2874)

Optical waveguides

With optical coupler

Movable coupler

C385S016000, C385S017000

Reexamination Certificate

active

07120331

ABSTRACT:
An optical device according to an embodiment of the present invention has an actuator structure. The actuator structure has a substrate, a stationary electrode, a movable electrode, an optical element, and a hole portion. The stationary electrode is provided on a surface of the substrate. The movable electrode is provided on the surface of the substrate. The optical element is provided on the movable electrode. The substrate faces the movable electrode. The hole portion is formed in a part of the substrate. A region near the movable electrode where the optical element is provided is immersed in a matching oil.

REFERENCES:
patent: 6404942 (2002-06-01), Edwards et al.
patent: 6643426 (2003-11-01), McDonald
patent: 7006722 (2006-02-01), Kurumada et al.
patent: 2003/0117038 (2003-06-01), Marxer
patent: 2003/0123786 (2003-07-01), Yee
patent: 2004/0008921 (2004-01-01), Kanie et al.
patent: 2005/0062565 (2005-03-01), Chou
patent: 2003-24118 (2003-08-01), None

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