Optical device and exposure apparatus

Details Optical device and exposure apparatus Optical device and exposure apparatus

2011-01-25

2011-01-25

Hahm, Sarah (Department: 2874)

Optical waveguides

With optical coupler

Input/output coupler

C385S033000, C385S050000

Reexamination Certificate

active

07876987

ABSTRACT:
The present invention provides an optical device and an exposure apparatus capable of suppressing a reduction in light output. The optical device of the present invention includes a laser light source which emits laser light having a short wavelength (e.g., 160 to 500 nm), a lens, a transparent member and an optical fiber provided with a junction-inhibiting film. The optical device is configured such that light density of abutment faces between the transparent member and the optical fiber formed with the junction-inhibiting film is 4464 W/mm2or less, thereby suppressing a reduction in light output which may be caused by fusion.

REFERENCES:
patent: 4483585 (1984-11-01), Takami
patent: 7141927 (2006-11-01), Manning
patent: 05-288967 (1993-11-01), None
patent: 2006-286866 (2006-10-01), None
patent: 2007-025431 (2007-02-01), None
patent: 2004/068230 (2004-08-01), None
Dijon et al, “High damage threshold fluoride UV mirrors made by Ion beam sputtering,” Proc. SPIE, vol. 3244, 406, pp. 406-416 and abstract, 1998.

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