Optical device and a method of manufacture thereof

Details Optical device and a method of manufacture thereof Optical device and a method of manufacture thereof

1993-01-27

1995-01-24

Ullah, Akm E.

Optical waveguides

With optical coupler

Input/output coupler

385 52, 385 55, G02B 636

Patent

active

053848721

ABSTRACT:
A block of monocrystalline silicon oriented so as to have a body surface aligned in a {110} crystallographic plane is selectively etched so as to define a groove for receiving an optical waveguide and a reflecting surface facing the groove. The groove is aligned with a <110> crystallographic axis. The reflecting surface is in a {100} crystallographic plane. Thus, the groove is parallel to the body surface and the reflecting surface is at 45.degree. to the body surface.

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