Optics: measuring and testing – Shape or surface configuration – By projection of coded pattern
Reexamination Certificate
2007-05-01
2007-05-01
Nguyen, Sang H. (Department: 2877)
Optics: measuring and testing
Shape or surface configuration
By projection of coded pattern
C356S625000
Reexamination Certificate
active
10859252
ABSTRACT:
Optical characterization of lateral features of a pattern is provided. A plane-wave optical response is calculated for each feature. At least one of these plane-wave responses is calculated from an effective optical property (e.g., a waveguide modal refractive index). Such effective optical properties depend on feature geometry and on intrinsic material optical properties. The plane-wave responses for each feature are combined to generate a modeled pattern response. By fitting the modeled pattern response to a corresponding measured pattern response, estimates for pattern feature parameters are obtained. The use of an effective optical property improves model accuracy, especially for features having a size on the order of a wavelength or less, without significantly increasing computation time.
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Chen Shuqiang
Li Guoguang
Walsh Phillip
Lumen Intellectual Property Services Inc.
n&k Technology Inc.
Nguyen Sang H.
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