Optical detection apparatus for detecting information relating t

Details Optical detection apparatus for detecting information relating t Optical detection apparatus for detecting information relating t

1995-11-17

1997-09-09

Font, Frank G.

Optics: measuring and testing

By dispersed light spectroscopy

Utilizing a spectrometer

336363, 250237G, G01B 1100

Patent

active

056661967

ABSTRACT:
An apparatus for optically detecting information relating to the relative displacement of an object on which a diffraction grating, arranged in two axial directions with a predetermined pitch. The apparatus includes a light-emitting device configured to emit a light beam, and a first optical element configured to divide the light beam from the light-emitting device into a plurality of light beams directed in each of the two axial directions to the diffraction grating on the object which produces a plurality of diffracted light beams for each of the two axial directions. The apparatus also includes a second optical element positioned and configured to receive and combine a plurality of diffracted light beams for each of the two axial directions from the diffraction grating on the object, and a plurality of detection units, each configured to receive and detect the combined plurality of diffracted light beams for one of the two axial directions, thereby detecting information relating to the relative displacement of the object in each of the two axial directions.

REFERENCES:
patent: 3713139 (1973-01-01), Sanford et al.
patent: 5068530 (1991-11-01), Ieki et al.
patent: 5204524 (1993-04-01), Ichikawa et al.
patent: 5214280 (1993-05-01), Rieder et al.
patent: 5264915 (1993-11-01), Huber et al.
patent: 5283434 (1994-02-01), Ishizuka et al.

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