Optical detecting system wtih self-correction

Details Optical detecting system wtih self-correction Optical detecting system wtih self-correction

1992-07-29

1994-08-09

Warden, Robert J.

Optics: measuring and testing

Inspection of flaws or impurities

Having predetermined light transmission regions

250236, 250563, 250571, G01N 2100

Patent

active

053371402

ABSTRACT:
A laser beam particle-detecting apparatus can automatically detect the position of minute particles on a substrate. A laser beam can be scanned across the substrate, and optical detectors can optically detect the laser beam after incidence with the substrate to define the position of any minute particles. Correction factors characteristic of the laser beam particle-detecting apparatus can be utilized to adjust the coordinates of the particle position, whereby any inaccuracies in the detecting apparatus can be compensated.

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patent: 4898471 (1990-02-01), Stonestrom et al.
patent: 4902131 (1990-02-01), Yamazaki et al.
patent: 4999510 (1991-03-01), Hayano et al.

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