Optical detecting system for determining particle position on a

Details Optical detecting system for determining particle position on a Optical detecting system for determining particle position on a

1992-07-29

1994-06-14

Warden, Robert J.

Optics: measuring and testing

Inspection of flaws or impurities

Having predetermined light transmission regions

250561, 250236, 250563, 356431, G01N 2100

Patent

active

053214951

ABSTRACT:
An apparatus for detecting particles on a substrate incorporates a calibration system to correct any change in the angle of swing of a beam scanning mirror over a period of time. A pair of optical detectors can be positioned within the optical path between the scanning mirror and the substrate to provide a fixed reference point from which positional adjustments or calibrations can be made over the life of the instrument to eliminate any drifting of the positional signals of the actually detected particles on the substrate.

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