Optical deflector and optical instrument using the same

Details Optical deflector and optical instrument using the same Optical deflector and optical instrument using the same

2007-05-24

2008-11-04

Cherry, Euncha P (Department: 2872)

Optical: systems and elements

Deflection using a moving element

By moving a reflective element

Reexamination Certificate

active

07446920

ABSTRACT:
An optical deflector arranged to be relatively stably driven regardless of any environmental disturbance such as temperature, includes an oscillating system160having plural natural oscillation modes of different frequencies, a driving unit for driving the oscillating unit, and a drive control unit for supplying a driving signal to the driving unit, the oscillating system160including a first oscillator movable element11with a light deflecting element22, a first torsion spring12, a second oscillator movable element13, a second torsion spring12and a supporting member15, the optical deflector further including a distortion detecting element25aand25bfor detecting mechanical deformation of the first and/or second torsion spring and a heat generating element19, for stabilizing the frequencies of the natural oscillation modes and the state of scan to ensure stable sinusoidal-wave combined drive.

REFERENCES:
patent: 4859846 (1989-08-01), Burrer
patent: 6850349 (2005-02-01), Miyajima et al.
patent: 6924915 (2005-08-01), Hirose et al.
patent: 9-197334 (1997-07-01), None
patent: 2002-321195 (2002-11-01), None
patent: 2004-069731 (2004-03-01), None
C.S. Smith, “Piezoresistance Effect in Germanium and Silicon,” Physical Review, vol. 94, No. 1, pp. 42-49, Apr. 1, 1954.

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