Optical deflection device

Details Optical deflection device Optical deflection device

2007-01-23

2007-01-23

Phan, James (Department: 2872)

Optical: systems and elements

Deflection using a moving element

Using a periodically moving element

C359S198100, C359S199200, C359S201100, C359S213100, C359S214100

Reexamination Certificate

active

11020279

ABSTRACT:
An optical deflection device is disclosed that is able to drive a mirror therein to move smoothly. In the optical deflection device, notches are formed in the mirror, and when the notches hit against a bearing member, the mirror is stopped, thus preventing the mirror from being out of position in the horizontal direction. In addition, eaves at the top of the bearing member prevent the mirror from being out of position in the upward direction. Further, a ridge acting as a fulcrum prevents the mirror from being out of position in the downward direction. Moreover, the bearing member limits movement of the mirror in the bearing direction. Therefore, the mirror can rotate smoothly until it hits against the electrodes, and the mirror is rotatable but not out of position.

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Larry J. Hornbeck, “Deformable-Mirror Spatial Light Modulators”, SPIE Critical Reviews Series, vol. 1150, pp. 86-102.

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