Optical coupling circuit and fabrication process therefor

Details Optical coupling circuit and fabrication process therefor Optical coupling circuit and fabrication process therefor

1997-05-06

1999-05-25

Ngo, Hung N.

Optical waveguides

Integrated optical circuit

385131, 385132, 385147, G02B 610

Patent

active

059076461

ABSTRACT:
An optical coupling circuit includes an optical waveguide having an optical waveguide forming layer having a lower clad layer, a core layer and an upper clad layer. An optical element is mounted on an optical element mounting portion formed by removing a portion of the optical waveguide forming layer. The optical coupling circuit optically couples an end face of the exposed thin waveguide and the optical element mounted on the optical element mounting portion. In such optical coupling circuit, at least one thin film is inserted in the optical waveguide forming layer, and, in the thin film, there is a part of said thin film removed at said optical element mounting portion. Mass-production of the optical coupling circuit and simplification of the fabrication process can be achieved. A reference plane in the height direction is stably formed in the wafer, and heat radiation or removing of the light emitting element can be performed.

REFERENCES:
patent: 4750799 (1988-06-01), Kawachi et al.
patent: 5488678 (1996-01-01), Taneya et al.
Hybrid Integration of Semiconductor Lasers with Si-Based Single-Mode ridge Waveguides: Friedrich et al 8217 Journal of Lightwave Technology 10 (1992) Mar., No. 3, New York, US; pp. 336-340.
"Design of Tapered Semiconductor Waveguide for Transforming Mode-Size" Mitomi et al The Institute of Electronics, Information and Communication Engineers, Electronics Societey Conf. SC-1-2; 1995; pp. 311-312.
"A WDM optical transmitter/receiver module configuration using a PLC platform" Yamada et al The Institute of Electronics, Information and Communication Engineers, Electronics Society Conf. SC-1-11; 1995; pp. 329-330.
"Planar Lightwave Circuit Platform with Coplanar Waveguide for Opto-Electronic Hybrid Integration" Mino et al Journal of Lightwave Technology, vol. 13, No. 12, Dec. 1995; pp. 2320-2325.

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