Optical connection member of silicon and method for the manufact

Details Optical connection member of silicon and method for the manufact Optical connection member of silicon and method for the manufact

1993-02-22

1994-04-26

Gonzalez, Frank

Optical waveguides

With disengagable mechanical connector

Optical fiber to a nonfiber optical device connector

385 91, 385 92, G02B 630

Patent

active

053074335

ABSTRACT:
A member of silicon, having at least two regions of single-crystal silicon having mutually different crystal orientations for anisotropic etching to produce advantageous profiles, and method for the manufacture thereof. In such a member of crystalline silicon, such as employed in silicon microtechnology, both adjustment aids for round and cylindrical members as well as adjustment aids for rectangular members can be fashioned using only the basis of anisotropic etching. The two regions can be defined by two wafers of differently oriented, single-crystal silicon that have their flat sides joined to one another.

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