Optical component having waveguides extending from a common...

Details Optical component having waveguides extending from a common... Optical component having waveguides extending from a common...

2005-07-26

2005-07-26

Mills, Gregory (Department: 1763)

Etching a substrate: processes

Forming or treating optical article

Reexamination Certificate

active

06921490

ABSTRACT:
A method of forming an optical component includes forming a first mask on an optical component precursor. The first mask is formed with a plurality of waveguide portions extending from a common portion. Each waveguide portion is positioned so as to protect a waveguide region of the optical component precursor where a waveguide is to be formed. The method also includes forming a second mask between waveguide portions of the first mask. The resistance of the second mask to etching varies along at least one dimension of the second mask.

REFERENCES:
patent: 4927781 (1990-05-01), Miller
patent: 4980268 (1990-12-01), Bartmann et al.
patent: 5348616 (1994-09-01), Hartman et al.
patent: 5364495 (1994-11-01), Van Der Tol et al.
patent: 5511142 (1996-04-01), Horie et al.
patent: 6525296 (2003-02-01), Matsushima et al.
patent: 2003/0044118 (2003-03-01), Zhou et al.
patent: 2003/0133661 (2003-07-01), Adibi et al.
patent: 0849615 (1998-06-01), None
patent: 11064657 (1999-03-01), None
Brenner, et al.,Vertical InP/InGaAsP Tapers for Low-Loss Optical Fibre-Waveguide Coupling, Electronic Letters Oct. 22, 1992 vol. 28, No. 22, pp 20402041.
Dumbravescu,3-D Resolution Gray-Tone Lithography, Proceedings of SPIE vol. 4231 (2000), pp 570-577.
Jeon, et al.,Simple Fabrication Method for Vertical Taper Using Tensile Stress Induced Mask and Selective Etching Technique, CLEO/Pacific Rim '99, pp 320-321.
Kley, et al.,Fabrication and Properties fo Refractive Micro-Optical Profiles for Lenses, Lens Arrays and Beam Shaping Elements, Proceedings of SPIE vol. 4231 (2000), pp 144-152.
Moerman, et al.,A Review of Fabrication Technologies for the Monolithic Integration of Tapers with III-V Semiconductor Devices, IEEE Journal of Selected Topics in Quantum Electronics, Dec. 1997, vol. 3-No. 6, pp 1308-1320.
Müller, G. et al.,First Low Loss InP/InGaAsP Optical Switch with Integrated Mode Transformers; ThC12.10; p. 37-40.
Reimer, et al.,Micro-optic Fabrication Using One-level Gray-Tone Lithography, SPIE vol. 3008, pp. 279-288.
Reimer, et al.,One Level Gray-Tone Lithography-Mask Data Preparation and Pattern Transfer, SPIE vol. 2783 pp 71-79.
Rickman, A.G. et al.,Silicon-on-Insulator Optical Rib Waveguide Loss and Mode Characteristics, Journal of Lightwave Technology, Oct. 1994, vol. 12-No. 10, pp 1771-1776.
Renaud, M. et al.,Compact Digital Optical Switches for Low Insertion Loss Large Switch Arrays on InP; Proc. 21stEur.Conf.on Opt. Comm. (ECOC '95-Brussels), p. 99-102.
Sugita, et al.,Very Low Insertion Loss Arrayed-Waveguide Grating with Vertically Tapered Waveguides, IEEE Photonics Letters, Sep. 2000, vol. 12-No. 9, pp. 1180-1182.
Waits, et al.,MEMS-based Gray-Scale Lithography, pp 182-185.

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