Optics: measuring and testing – Inspection of flaws or impurities – Surface condition
Reexamination Certificate
2005-10-04
2005-10-04
Rosenberger, Richard A. (Department: 2877)
Optics: measuring and testing
Inspection of flaws or impurities
Surface condition
C356S239200, C359S691000
Reexamination Certificate
active
06952256
ABSTRACT:
An objective lens system having reconfigurable optical components that enable the inspection of inspection surfaces in the absence of a pellicle or through a thin membrane pellicle, and using the same system, also enabling the inspection of inspection surfaces through a thick pellicle. An objective lens system includes a first group and a second group of optical elements. The first group of optical elements enables high numerical aperture and beam contraction. The second group of optical elements is capable of two mode operation enabling, in one mode, inspection through a thin membrane pellicle or in the absence of a pellicle and in another mode, enabling inspection through a thick pellicle. The system can also be enhanced through the use of an interposable aberration corrector plate that is used to correct optical aberrations caused by the presence, absence, or thickness of pellicles.
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International Search Report, dated Jan. 25, 2005.
Kvamme Damon
Roncone Ronald L.
Beyer Weaver & Thomas LLP
KLA-Tencor Technologies Corporation
Rosenberger Richard A.
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