Optical comparator system to separate unacceptable defects from

Details Optical comparator system to separate unacceptable defects from Optical comparator system to separate unacceptable defects from

1974-05-24

1976-03-16

Smith, Alfred E.

Optics: measuring and testing

Refraction testing

Prism engaging specimen

356168, G01B 1124

Patent

active

039443698

ABSTRACT:
In an optical comparison inspection system a single beam from a scanning light source is split to produce a pair of synchronously scanning focused light beams. One of the beams is directed onto a reference, light affecting patterned workpiece and the other beam is directed onto a similar patterned workpiece to be inspected. Both workpieces are mounted in optically equivalent positions on a traverse table which has a direction of travel orthogonal to parallel planes containing the scanning light beams. Pattern differences are represented by differences in photodetected representations of the two light beams, which are intensity modulated by the patterned workpieces. By electronically gating preselected combinations of the two modulated signals with circuitry employing multiple threshold detection elements, a resultant signal is produced which enables allowable edge aberrations to be discriminated from unacceptable defects in the patterns. Suitable display of the resultant signal permits an operator to rapidly ascertain both the number and location of only unacceptable defects.

REFERENCES:
patent: 3753617 (1973-08-01), Ehrat

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