Optics: measuring and testing – By light interference – For dimensional measurement
Reexamination Certificate
2011-05-03
2011-05-03
Toatley, Gregory J (Department: 2877)
Optics: measuring and testing
By light interference
For dimensional measurement
Reexamination Certificate
active
07936462
ABSTRACT:
An optical imaging system includes an optical radiation source (410, 510), a frequency clock module outputting frequency clock signals (420), an optical interferometer (430), a data acquisition (DAQ) device (440) triggered by the frequency clock signals, and a computer (450) to perform multi-dimensional optical imaging of the samples. The frequency clock signals are processed by software or hardware to produce a record containing frequency-time relationship of the optical radiation source (410, 510) to trigger the sampling process of the DAQ device (440). The system may employ over-sampling and various digital signal processing methods to improve image quality. The system further includes multiple stages of routers (1418, 1425) connecting the light source (1410) with a plurality of interferometers (1420a-1420n) and a DAQ system (1450) triggered by frequency clock signals to perform high-speed multi-channel optical imaging of samples.
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Barry Scott
Cable Alex E.
Jiang James Y.
Graham Curtin, PA
Richey Scott M
Thorlabs, Inc.
Toatley Gregory J
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