Optical coating apparatus

Coating apparatus – Control means responsive to a randomly occurring sensed... – Sampling of associated base

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118715, 118724, 118725, B05C 1100

Patent

active

046694188

ABSTRACT:
Apparatus for evaporating numerous layers of various substances upon a substrate includes square witness chips transparent to a specific beam of radiation. A witness chip holder, having a cylindrical base, has an axial hole vertically disposed from its central axis. The axial hole has a cross-sectional shape that corresponds to the external configuration of an octagram wherein recesses of right-angled vertices of the octagram are formed in the axial hole. Each witness chip is rotatably stacked within alternate formed verticular recesses of the octagrammatic hole. A drum with a square hole at its base has a cylindrical recess for receiving the cylindrical base of the witness chip holder, thus providing for reciprocating movement therebetween. The square hole is slightly larger than the witness chip so that the lowermost witness chip of a stack of chips is held at its vertices by the base of the drum. A geneva mechanism rotates the holder with respect to the drum so as to eject one witness chip at a time through the square hole. The substrate and the lowermost witness chip are simultaneously evaporated a substance. A radiation beam is either directed through the stacked witness chips in the holder or reflected from the lowermost chip. Specific transmissibility of radiation through the stacked chips or reflected radiation of the lowermost chip is detected. A toroidal-shaped heating element forming an annulus wrapped with sets of heating wire has the heating wire provided with turns of wire that are adjacent to each other, oriented parallel to each other.

REFERENCES:
patent: 4024291 (1977-05-01), Wilmanns
patent: 4207835 (1980-06-01), Schwiecker
patent: 4207836 (1980-06-01), Nonaka

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