Optical coat reticulation post hybridization

Details Optical coat reticulation post hybridization Optical coat reticulation post hybridization

1995-01-31

1997-03-04

Powell, William

Etching a substrate: processes

Forming or treating optical article

216 17, 216 76, B44C 122, C03C 1500

Patent

active

056076002

ABSTRACT:
An infrared sensing array 46 is coupled to a sensing integrated circuit structure 48, and then inter-pixel thermal isolation slots 62 are etched in the optical coating 32 of the infrared sensing array 46. An optional protective material 64 may be deposited over at least the sensing integrated circuit structure 48 for additional protection.

REFERENCES:
patent: 4080532 (1978-03-01), Hopper
patent: 4740700 (1988-04-01), Shaham et al.
patent: 4745278 (1988-05-01), Hanson
patent: 4792681 (1988-12-01), Hanson

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