Optical: systems and elements – Mirror – Plural mirrors or reflecting surfaces
Patent
1996-05-10
1998-10-27
Dzierzynski, Paul M.
Optical: systems and elements
Mirror
Plural mirrors or reflecting surfaces
359856, 359861, 359850, 359616, 359855, 385133, G02B 508, G02B 7182, G02B 2708
Patent
active
058285059
ABSTRACT:
An internally-mirrored tube of constant cross-section, for use as a beam-shaper-uniformizer in an optical lithography tool, requires precision assembly, closely approaching total internal reflection, to be able to accept at the entry end a beam of laser light of specified numerical aperture, having an arbitrary cross-section and a non-uniform intensity profile, and deliver at the exit a beam having the same numerical aperture, the desired cross-sectional shape, and a substantially uniform intensity profile across the illuminated area. Imperfections at the edges of the component slabs would interfere with operation. The difficulty of machining internal surfaces to mirror smoothness, and the difficulty of applying mirror finishes to internal surfaces, suggests that the uniformizer be assembled from mirrored slabs cemented together. Achieving precision without breakage or scuffing of mirrors is difficult. Precision and ease are supplied by a technique of using two parts, two of rectangular cross-section with mirrored flat side, and four (two complementary pairs) of trapezoidal cross-section with a mirrored 60.degree. bevel-edge, in a stacked slab assembly. The stacked slabs are adjusted for alignment and cemented by external beads of epoxy, or clamped permanently.
REFERENCES:
patent: 4065204 (1977-12-01), Lipkins
patent: 4998789 (1991-03-01), Atkins
Anvik Corporation
Dzierzynski Paul M.
Kling Carl C.
Sikd-er Mohammad Y.
LandOfFree
Optical beam-shaper-uniformizer construction does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Optical beam-shaper-uniformizer construction, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Optical beam-shaper-uniformizer construction will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-1618327