Optical beam scanning apparatus

Details Optical beam scanning apparatus Optical beam scanning apparatus

1991-07-23

1992-08-11

Hannaher, Constantine

Optical: systems and elements

Deflection using a moving element

Using a periodically moving element

359211, 250235, 346108, G02B 2600, G11B 709, G03G 1504

Patent

active

051384787

ABSTRACT:
An optical beam scanning apparatus includes a beam-to-beam distance adjuster (300) for rotationally displacing a beam splitter (301). The beam-to-beam distance adjuster (300) comprises three arm members (312, 313, 314) which are linked to each other through notch portions (323, 324). A member (315) is linked to the arm member (313). The beam splitter (301) is secured on the member (315) from which a plate spring (316) extends. A projection member (317) is provided between a leading edge portion of the plate spring (316) and the arm member (314). A rotation angle of the beam splitter (301) can be changed by actuating three arm members (312, 313, 314) in link motion, whereby a beam-to-beam distance between two beams (B.sub.a, B.sub.b) can be also changed.

REFERENCES:
patent: 4449215 (1984-05-01), Reno
patent: 4725855 (1988-02-01), Arimoto et al.
patent: 4760407 (1988-07-01), Arimoto et al.
patent: 4878066 (1989-10-01), Shiraishi
patent: 5006704 (1991-04-01), Mochizuki et al.
patent: 5006705 (1991-04-01), Saito et al.
"Piezodriven 50-.mu.M Range Stage with Subnanometer Resolution", Rev. Sci. Instrum., vol. 49, No. 12, Dec., 1978.

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