Optical beam concentrator

Details Optical beam concentrator Optical beam concentrator

1981-11-17

1984-11-20

Sikes, William L.

Coherent light generators

Particular resonant cavity

Specified cavity component

372 99, 350601, 350619, 350628, 350612, H01S 308

Patent

active

044843348

ABSTRACT:
An optical beam concentrator divides and redirects an incident beam to provide uniform irradiation along the length of a narrow rectangular area. The beam concentrator may form a part of an apparatus for laser irradiation of materials. The apparatus comprises a laser, a beam concentrator, and a support for the material being irradiated. Depending on the system parameters, the apparatus is particularly useful for gettering defects in semiconductor device fabrication or other materials processing applications.

REFERENCES:
patent: 3645606 (1972-02-01), La Vantine
patent: 3826561 (1974-07-01), Gregg
patent: 4195913 (1980-04-01), Dourte et al.
patent: 4289380 (1981-09-01), Tucker
patent: 4320164 (1982-03-01), Nicolas et al.
Ream; "A Convex Beam Integrator" Laser Focus, vol. 15, No. 11, Nov. 1979, pp. 68-71.

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