Optics: measuring and testing – By polarized light examination – With light attenuation
Patent
1998-09-08
2000-10-17
Font, Frank G.
Optics: measuring and testing
By polarized light examination
With light attenuation
356372, 356364, 356369, G01B 1124
Patent
active
061340138
ABSTRACT:
A method and apparatus for inspecting a three dimensional structure, such as an electronic component, using collimated light for accurately measuring the three-dimensional structure of members protruding above the surface of the component. Collimated light illuminates the surface, and spherical or other three-dimensional structure on the surface is analyzed, using stereoscopic, holographic, Moire, or conoscopic analysis of light reflected or scattered by the structure, using an array of optical detectors in a detector plane.
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Beck et al., "3-D Solder Paste Inspection for High-Yield Ball Grid Array (BGA) Assembly".
Malet Yann
Sirat Gabriel Y.
Font Frank G.
Optimet, Optical Metrology Ltd.
Punnoose Roy M.
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