Optical axis displacement sensor

Details Optical axis displacement sensor Optical axis displacement sensor

1987-02-24

1989-05-09

Evans, F. L.

Optics: measuring and testing

By polarized light examination

With light attenuation

356375, G01B 1114

Patent

active

048283908

ABSTRACT:
A first convex lens, having a focal length f1 and a second convex lens, having a focal length f2, are arranged at an interval d (=f1+f2). A mirror is provided, on the optical axis, to reflect the laser beam from a laser thereby emitting parallel beams, through the first lens, onto the surface to be measured. The interval between the first lens and the surface is f1+z1. The interval between the second lens and the image point, at which the image of the surface is formed, is f2+z2. A position detector of this point, comprises a slit plate, a third convex lens, having a focal length f3, and a CCD line sensor. The interval between the slit plate and the sensor is l.sub.0. The second and third lenses are so arranged that the focal points coincide. The slit plate is provided perpendicular to the optical axis, immediately before the third lens, and a pin hole is opened at an interval d.sub.0 on either side of the optical axis. The line sensor is positioned in parallel with the slit plate. The position z2 of the image point is obtained from the interval x of the incident positions of the beams incident onto the sensor, through the two pin holes.

REFERENCES:
patent: 4548504 (1985-10-01), Morander
patent: 4645347 (1987-02-01), Rioux

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