Optical-axis deflection type laser interferometer,...

Details Optical-axis deflection type laser interferometer,... Optical-axis deflection type laser interferometer,...

2007-08-21

2008-08-05

Chowdhury, Tarifur R (Department: 2886)

Optics: measuring and testing

By light interference

For dimensional measurement

C356S004090

Reexamination Certificate

active

07408650

ABSTRACT:
An optical-axis deflection type laser interferometer includes a reference ball serving as a measurement reference, a retroreflecting means disposed at an object to be measured, a laser interferometer length measuring apparatus outputting a measurement value between the apparatus and the retroreflecting means, and a rotational mechanism that rotates a beam projected from the laser interferometer length measuring apparatus around the reference ball. The laser interferometer additionally includes a displacement gauge that measures an error caused by a relative motion between the reference ball and the laser interferometer length measuring apparatus, and a rectilinear movement mechanism that displaces these in a direction of an optical axis of a measurement beam with respect to the reference ball while maintaining a relative positional relationship between the laser interferometer length measuring apparatus and the displacement gauge. With this structure, calibrating the displacement gauge without preparing a special calibrating device becomes possible, thereby securing traceability thereby securing traceability.

REFERENCES:
patent: 6147748 (2000-11-01), Hughes
patent: 6870605 (2005-03-01), Osawa et al.
patent: 2003/0179362 (2003-09-01), Osawa et al.
patent: 2007/0024861 (2007-02-01), Yanaka et al.
patent: 20 2004 007 647 (2004-09-01), None
patent: 0 919 830 (1999-06-01), None
patent: 1 750 085 (2007-02-01), None
Design of a High-Accuracy CMM Based on Multi-Lateration Techniques, E.B. Hughes et al., Jan. 7, 2000, Annals of the CIRP vol. 49/1/2000, pp. 391-394.

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