Optical axis adjustment device and exposure apparatus using...

Details Optical axis adjustment device and exposure apparatus using... Optical axis adjustment device and exposure apparatus using...

2008-04-15

2010-11-23

Kim, Peter B (Department: 2882)

Photocopying

Projection printing and copying cameras

Illumination systems or details

C355S060000

Reexamination Certificate

active

07839488

ABSTRACT:
In order to adjust the optical axis of a light beam L1in an exposure apparatus, on a support body in an XYZ three-dimensional coordinate system are mounted: a first mirror10having a reflective surface M1obtained by rotating a plane parallel to the XY plane around an axis11parallel to the Y axis by an angle of α; and a second mirror20having a reflective surface M2obtained by rotating a plane parallel to the XZ plane around an axis21parallel to the X axis by an angle of β. There are provided: position adjustment means for moving the entire support body having the two mirrors parallel to the XY plane; and angle adjustment means for adjusting the angle of the second mirror20. The incident light L1is reflected on the reflective surfaces M1and M2to be output as an outgoing light L3, where it is possible to perform an optical axis adjustment concerning position and angle by controlling the position adjustment means and the angle adjustment means.

REFERENCES:
patent: 6175451 (2001-01-01), Iriyama et al.
patent: 2002/0080459 (2002-06-01), Takeuchi
patent: 4-200892 (1992-07-01), None
patent: 5-228672 (1993-09-01), None
patent: 8-025073 (1996-01-01), None
patent: 11-305278 (1999-11-01), None
patent: 2002-133730 (2002-05-01), None
patent: 2002-196270 (2002-07-01), None
patent: 2002-228908 (2002-08-01), None

Affiliated with

Also associated with

Rating

Optical axis adjustment device and exposure apparatus using... does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Optical axis adjustment device and exposure apparatus using..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Optical axis adjustment device and exposure apparatus using... will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-4246987