Optical: systems and elements – Lens – With support
Reexamination Certificate
2011-04-19
2011-04-19
Thompson, Timothy J (Department: 2873)
Optical: systems and elements
Lens
With support
C359S820000, C359S823000, C355S052000
Reexamination Certificate
active
07929227
ABSTRACT:
An optical assembly supported in an arrangement, especially in an objective or in an illuminating or exposure system, in the interior of a housing comprising at least one optical element, especially a lens, a mirror, or an aperture, wherein the at least one element is influenceable by at least one manipulator is characterized in that the at least one manipulator is arranged either outside of the housing or in a holding means that is separated entirely or to a large extent by the help of a decoupling means, and that there is provided an effective coupling between the manipulator and the element to be influenced by the manipulator in the interior of the arrangement.
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International Search Report and a Written Opinion from a counterpart application No. PCT/EP2006/000684.
Aubele Karl-Eugen
Bieg Hermann
Kwan Yim-Bun Patrick
Nguyen Uy-Liem
Sanvido Saverio
Carl Zeiss SMT GmbH
Fish & Richardson P.C.
Thompson Timothy J
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