Optical arrangement for several individual beams with a segmente

Details Optical arrangement for several individual beams with a segmente Optical arrangement for several individual beams with a segmente

1997-09-02

2000-01-04

Mai, Huy

Optical: systems and elements

Single channel simultaneously to or from plural channels

By partial reflection at beam splitting or combining surface

359629, 359850, 359862, G02B 2714, G02B 508

Patent

active

060116544

ABSTRACT:
An optical arrangement includes several separate individual beams that pass through a common focus before a first segmented mirror field and, after reflection by respective separate mirrors of the segmented mirror field, the individual beams are imaged by an objective on one or more workpieces. A second segmented mirror field is arranged between the first segmented mirror field and the object, or at least one beam splitter is arranged after the focus and deflects the individual beams onto at least one segmented mirror field, by which they are reflected back at least nearly identically on themselves.

REFERENCES:
patent: 5345340 (1994-09-01), Goedert
patent: 5674414 (1997-10-01), Schweizer
patent: 5676866 (1997-10-01), in den Baumen et al.
patent: 5796526 (1998-08-01), Anderson

Affiliated with

Also associated with

Rating

Optical arrangement for several individual beams with a segmente does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Optical arrangement for several individual beams with a segmente, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Optical arrangement for several individual beams with a segmente will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-1077196