Optical apparatus, method of determining position of optical...

Details Optical apparatus, method of determining position of optical... Optical apparatus, method of determining position of optical...

2007-11-27

2007-11-27

Toatley, Jr., Gregory J. (Department: 2877)

Optics: measuring and testing

Lens or reflective image former testing

C356S601000

Reexamination Certificate

active

11627125

ABSTRACT:
An optical apparatus which includes an image forming optical system having a movable optical element, and a driving mechanism configured to move the optical element. The apparatus includes a first block which measures a wavefront aberration of the optical system. A second block obtains a linear evaluation value of an aberration expressed by a linear function of a position of the movable optical element out of aberrations of the optical system, and a quadratic evaluation value of a square of a root mean square of the wavefront aberration measured by the first block expressed by a quadratic function of the position. A third block uses a dummy variable as an upper limit value of the linear evaluation value and obtains a minimum value of the dummy variable by a linear programming. A fourth block determines a position of the optical element to be moved by the driving mechanism.

REFERENCES:
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patent: 2002/0163738 (2002-11-01), Yoshihara
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patent: 11-176744 (1999-07-01), None
patent: 2002-367886 (2002-12-01), None
T. Yoshihara, et al., “Realization of Very-Small Aberration Projection Lenses”, Proceedings of SPIE, vol. 4000, pp. 559-566 (2000).

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