Optical apparatus, measurement method, and semiconductor...

Details Optical apparatus, measurement method, and semiconductor... Optical apparatus, measurement method, and semiconductor...

2006-08-01

2006-08-01

Toatley, Jr., Gregory J. (Department: 2877)

Optics: measuring and testing

Of light reflection

With diffusion

Reexamination Certificate

active

07084982

ABSTRACT:
An optical apparatus includes an optical device arranged on an optical path extending from a light source to a predetermined position, an optical sensor, and a measuring device which measures an optical characteristic or a change in an optical characteristic of the optical device on the basis of an output from the optical sensor. The optical sensor is arranged outside the optical path and senses light which is emitted from a second light source arranged outside the optical path and is reflected by the optical device.

REFERENCES:
patent: 6825481 (2004-11-01), Miyake
patent: 6864490 (2005-03-01), Underwood et al.
patent: 6867843 (2005-03-01), Ogushi et al.
patent: 2003/0090662 (2003-05-01), Yamamoto
patent: 2005/0006600 (2005-01-01), Shichi et al.

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