Optics: measuring and testing – By dispersed light spectroscopy – Utilizing a spectrometer
Patent
1989-08-04
1991-10-15
Willis, Davis L.
Optics: measuring and testing
By dispersed light spectroscopy
Utilizing a spectrometer
356358, G01B 902
Patent
active
050569210
DESCRIPTION:
BRIEF SUMMARY
The present invention relates to optical apparatus for use with interferometric measuring devices. In particular, the invention relates to optical apparatus for measuring deviations in the movement of a machine component during movement thereof along its main movement axis with an interferometric measuring device.
Deviations in the movement of a machine component along its main movement axis generally involve rotation of the component about one or more axes of the machine, usually referred to as the x, y and z axes, and are referred to as pitch, roll and yaw errors. There are also errors in straightness of the movement which involve lateral deviations of the machine component from the main movement axis.
For the purposes of this specification, assuming that the machine component is moving along the x axis as its main movement axis,
"roll" is defined as rotation of the component about an axis parallel to the x axis,
"pitch" is defined as rotation of the component about an axis parallel to the y axis, and
"yaw" is defined as rotation of the component about an axis parallel to the z axis.
Throughout this specification the reference to a light beam should be interpreted to mean a beam having a wavelength in the range from infra-red, through visible to the ultra violet part of the spectrum.
In accordance with the present invention optical apparatus for measuring deviations in the movement of a machine component during movement thereof along its main movement axis comprises,
an optical device and a straight mirror, one of which is attached to the machine component, the other of which is mounted on a fixed part of the machine whereby relative movement is established therebetween during movement of the machine component,
said mirror having a longitudinal axis which is arranged to be parallel to the main movement axis of the machine component so that its reflecting surface faces in a direction normal to the main movement axis of the machine component,
means for generating at least one light beam directed towards the optical device,
and wherein the optical device includes means for generating from said at least one light beam, a measuring beam directed orthogonally towards the reflecting surface of the mirror on a first path, and a reference beam,
means being provided for interferometrically determining any variation in the path length of the measuring beam in relation to that of the reference beam.
The invention also includes methods of measuring roll, straightness, parallelism, pitch and yaw of the machine component as defined in the appended claims.
Examples of the invention will now be more particularly described with reference to the accompanying drawings in which:
FIG. 1 illustrates schematically the principle used by the invention for measuring roll of a machine component in one direction of movement thereof.
FIG. 2 is an illustration of one embodiment of an optical device for use on the machine shown in FIG. 1 showing the paths of the various light beams through the device.
FIG. 3 is a plan view in the direction of the arrow A of FIG. 2.
FIG. 4 is an end view in the direction of the arrow B of FIG. 2.
FIG. 5 is a plan view of an alternative optical component for use with the machine of FIG. 1.
FIG. 6 is an elevation of the optical component of FIG. 5.
FIG. 7 shows a modification to the optical device of FIG. 4.
FIG. 8 is a plan view of an alternative optical device for measuring straightness of the movement of a machine component,
FIG. 9 is a plan view of a further alternative optical device for measuring yawing movements of a machine component, and
FIG. 10 is a plan view of the machine showing the positioning of the mirror and optical device for measuring parallelism of two tracks of the machine.
Referring now to FIG. 1 of the drawings there is shown a measuring machine having a fixed work-table 1, and movable components including a vertical columns 2, 2a having a main axis of movement in the direction x--x, a carriage 3 mounted on the column 2 and having a main axis of movement in the direction y--y, and a
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Feinwerktechn. & Messtechn. vol. 85, No. 6, 8/9/77.
Koren Matthew W.
Renishaw plc
Willis Davis L.
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