Optical apparatus for the homogenization of laser radiation and

Details Optical apparatus for the homogenization of laser radiation and Optical apparatus for the homogenization of laser radiation and

1997-07-17

1998-08-18

Epps, Georgia Y.

Optical: systems and elements

Single channel simultaneously to or from plural channels

By surface composed of lenticular elements

359621, 359625, G02B 2710

Patent

active

057965218

ABSTRACT:
An optical apparatus for the homogenization of laser radiation, in particular of an excimer laser, and for the generation of several lighting fields (F1, F2) from this radiation comprises a plurality of acentric lens segments (G1a, G1b, G1c, G1d; G2a, G2b, G2c, G2d). The acentric lens segments are characterized in that they are segments of cylindrical lenses with an axis of symmetry and that the portion of the cylindrical lens which contains the axis of symmetry is not part of the acentric lens segment. Several groups (G1, G2) of acentric cylindrical lens segments are provided, with each group generating a lighting field (F1, F2) of homogeneous energy density. A collecting lens (S) is arranged downstream of the acentric lens segments, which generates the lighting fields (F1, F2) on a work plane (E).

REFERENCES:
patent: 3580661 (1971-05-01), Cooper, Jr.
patent: 4185891 (1980-01-01), Kaestner
patent: 5319496 (1994-06-01), Jewell et al.
patent: 5414559 (1995-05-01), Burghardt et al.

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