Optical apparatus for the detection of scattered light

Details Optical apparatus for the detection of scattered light Optical apparatus for the detection of scattered light

1985-03-13

1987-09-01

Rosenberger, R. A.

Optics: measuring and testing

Of light reflection

With diffusion

356384, G01B 1102

Patent

active

046905650

ABSTRACT:
An optical apparatus for the detection of scattered light has a light source for supplying a beam of light with a determined wavelength, an objective lens for focusing the light beam on a test object and a photo receptor for receiving the light scattered around the objective lens by the boundaries of a pattern on the test object. The apparatus further has a light converging ring member and a filter arranged in the optical path between the test object and the photo receptor to allow the scattered light from the test object to enter the filter and the photo receptor after the scattered light is converted into a beam of substantially collimated rays by the action of reflection and convergence by the converging ring member.

REFERENCES:
patent: 2852693 (1958-09-01), Hughes et al.
patent: 4423331 (1983-12-01), Koizumi et al.

Affiliated with

Also associated with

Rating

Optical apparatus for the detection of scattered light does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Optical apparatus for the detection of scattered light, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Optical apparatus for the detection of scattered light will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-1262159