Optical apparatus for monitoring profiles of textured spots duri

Details Optical apparatus for monitoring profiles of textured spots duri Optical apparatus for monitoring profiles of textured spots duri

1997-03-24

1999-09-14

Evans, Geoffrey S.

Electric heating

Metal heating

By arc

21912176, 21912183, 356359, B23K 2600, G01B 1130

Patent

active

059518910

ABSTRACT:
A disk texturing tool is used, for example, to provide textured spots in an annular portion of both sides of a hardfile disk. An optical system includes a laser directed at a beamsplitter to split the laser beam into two beams having approximately equal power, which are directed along parallel paths through a power control optics block to expose simultaneously opposite sides of a disk to be textured. A visible laser beam is also directed along this optical system to an inspection spot on each side of the disk, by which a central portion of each textured spots passes. A beam angle detector detects deflection of a reflection of the inspection beam from this spot in the direction of motion of the disk at this spot. This deflection provides a measure of the topography of the spot.

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Instruction Manual for Model 7300 Laser Systems, Spectra Physics, Mountain View, CA, No date.

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