Optical apparatus for measuring the size and location of optical

Details Optical apparatus for measuring the size and location of optical Optical apparatus for measuring the size and location of optical

1980-01-03

1982-05-18

McGraw, Vincent P.

Optics: measuring and testing

Inspection of flaws or impurities

Having predetermined light transmission regions

250572, 356446, G01B 1130, G01N 2147

Patent

active

043302050

ABSTRACT:
In an optical apparatus for inspecting optical defects, a laser beam generated from a laser unit is converted by a collimator lens into a light beam having a suitable diameter. An X-Y scanner for two-dimensionally scanning the light beam is situated at a forward focal point of a scanning lens. The light beam passed through the scanning lens is converged substantially in parallel with an optical axis of the scanning lens and is reflected by a semi-transparent mirror and is vertically projected onto a flat surface to be inspected of an article situated substantially at a backward focal point of the scanning lens. Thus, on the surface to be inspected of the article there is given a projected beam spot having a larger diameter than that of the relevant circle of least confusion. The light rays reflected by the article surface to be inspected are converged by a converging lens the forward focal point of which is located on the said article surface. The light rays regularly reflected by that article surface are converged by the converging lens to a spatial filter and one cut off by the same. Only light rays irregularly reflected by the article surface enters a photo-detecting unit through the spatial filter.

REFERENCES:
patent: 3565568 (1971-02-01), Hock
patent: 3790287 (1974-02-01), Cuthbert et al.
patent: 3795452 (1974-03-01), Bourdelais et al.
patent: 3892494 (1975-07-01), Baker et al.
"Particle Sizing Using Laser Interferometry"; Roberds; Applied Optics., vol. 16, #7, Jul. 1977, pp. 1861-1868.
"Laser Beam Reading of Video Records", Velzel, Applied Optics., vol. 17, #13, Jul. 1978, pp. 2029-2036.

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