Radiant energy – Ionic separation or analysis – Static field-type ion path-bending selecting means
Patent
1989-07-06
1990-05-01
Perkey, W. B.
Radiant energy
Ionic separation or analysis
Static field-type ion path-bending selecting means
354152, 2502012, 350 16, G03B 300, G03B 1912, G01J 120, G02B 522
Patent
active
049222821
ABSTRACT:
An optical system for detecting the focus of an objective lens includes a focus detecting apparatus for receiving light intensity distributions reflected from an object and formed by light flux passing through two different areas of a pupil of the objective lens, and for forming a signal indicative of the focus state of the objective lens. A light dividing device is obliquely arranged with respect to the pupil areas of the objective lens and distributes the light fluxes which pass through the objective lens to both the focus detecting apparatus and an optical apparatus. The light dividing device has a dielectric multilayer film such that spectral characteristics of a wave length area in which the focus detecting apparatus has a sensitivity are substantially flat.
REFERENCES:
patent: 4561748 (1985-12-01), Omaki et al.
patent: 4634255 (1987-01-01), Suda et al.
patent: 4743932 (1988-05-01), Matsui
patent: 4771307 (1988-09-01), Kuno et al.
patent: 4778263 (1988-10-01), Foltyn
patent: 4818865 (1989-04-01), Matsui et al.
Koyama Takeshi
Ohtaka Keiji
Canon Kabushiki Kaisha
Perkey W. B.
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