Optical apparatus for laser machining

Details Optical apparatus for laser machining Optical apparatus for laser machining

1993-03-01

1995-05-09

Evans, Geoffrey S.

Electric heating

Metal heating

By arc

21912167, 21912175, 2191218, 21912184, B23K 2606

Patent

active

054142393

ABSTRACT:
A laser-machining optical apparatus designed to efficiently work an object through a large area thereof by projecting an image of a mask to the object through a laser beam having a small sectional area and a high energy density. The apparatus has a laser head for oscillating laser light for working the specimen, a mask provided in the optical path of the laser light beam between the specimen and the laser head and having a working pattern formed on its surface, an objective provided in the optical path of the laser-light beam between the mask and the specimen, a mechanism on which the mask and the specimen are placed so that an optical imaging relationship is maintained therebetween with the objective interposed therebetween, and a two-dimensional scanning device provided in the optical path of the laser light beam between the laser head and the mask to two-dimensionally scan the surface of the mask with the laser light beam from the laser head.

REFERENCES:
patent: 4001840 (1977-01-01), Becker et al.
patent: 4455485 (1984-06-01), Hosaka et al.
patent: 4508749 (1985-04-01), Brannon et al.
Poulin, G. Darcy, et al. "A Versatile Excimer Laser Processing System," SPIE, vol. 998, Excimer Beam Applications, Dec. 1988, pp. 17-23, (English).
Bachmann, F. "Excimer Lasers in a Fabrication Line for a Highly Integrated Printed Circuit Board," Chemtronics, vol. 4, Sep. 1989, pp. 149-152, (English).
Brannon, James H. "Micropatterning of Surfaces by Excimer Laser Projection," J. Vac. Sci. Technol. B 7 (5), Sep./Oct. 1989, pp. 1064-1071 (English).
Taniguchi, Hiroshi, et al. "Application of Excimer Laser to Machining of Printed Circuit Board," Oct. 1991, pp. 120-125 (Japanese).

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