Optical apparatus for determining the height and tilt of a sampl

Details Optical apparatus for determining the height and tilt of a sampl Optical apparatus for determining the height and tilt of a sampl

1997-10-29

1999-07-27

Kim, Robert H.

Optics: measuring and testing

Angle measuring or angular axial alignment

356375, 25055929, G01B 1114

Patent

active

059299835

ABSTRACT:
A device is provided for determining the height and/or tilt of local features on the surface of a sample. The device includes a laser projecting a collimated beam at an oblique angle at a reflection point on the sample surface and a converging lens having an optical axis extending at an angle of reflection equal to the angle of incidence from the reflection point. The focusing characteristics of the lens are used to separate the deflection of the reflected collimated beam due to tilt of the surface from such deflection due to linear displacement of the surface.

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