Optical apparatus for detecting the position of an object

Details Optical apparatus for detecting the position of an object Optical apparatus for detecting the position of an object

1986-08-08

1988-12-06

Rosenberger, R. A.

Optics: measuring and testing

By polarized light examination

With light attenuation

356372, G01B 1100

Patent

active

047892420

ABSTRACT:
An optical apparatus comprising a laser light source, an optical system for focusing a beam of light from the laser light source onto an object surface through an objective lens and a spatial filter disposed at the entrance pupil of the objective lens or at a position conjugated with the entrance pupil, wherein the origin of the divergence of the laser beam having an angle of divergence emitted from the laser light source is projected on the entrance pupil of the objective lens by the optical system.

REFERENCES:
patent: 4202627 (1980-05-01), Suzki et al.
patent: 4630927 (1986-12-01), Fulkerson

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