Optical apparatus and method of manufacturing device

Details Optical apparatus and method of manufacturing device Optical apparatus and method of manufacturing device

2011-04-12

2011-04-12

Nguyen, Hung Henry (Department: 2882)

Photocopying

Projection printing and copying cameras

With temperature or foreign particle control

C355S075000

Reexamination Certificate

active

07924398

ABSTRACT:
An optical apparatus including an optical element includes a holder configured to hold the optical element, and a rectifier configured to rectify a flow of gas in a space adjacent to a surface of the optical element, and to decrease the flow rate of the gas adjacent to the surface of the optical element.

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