Optical apparatus and displacement-information measuring apparat

Details Optical apparatus and displacement-information measuring apparat Optical apparatus and displacement-information measuring apparat

1994-01-28

1995-09-05

Rosenberger, Richard A.

Optics: measuring and testing

By polarized light examination

With light attenuation

356399, G01B 1100

Patent

active

054483581

ABSTRACT:
In an optical apparatus, a light beam from a light-emitting device is divided into a plurality of light beams by a first diffraction grating provided on a transparent substrate. The plurality of light beams are guided to a diffraction-grating scale which moves together with an object whose relative displacement is to be measured. Two light beams emanated from the diffraction-grating scale are combined by a second diffraction grating provided on the transparent substrate. A resultant light beam from the second diffraction grating is guided to photosensors. Relative displacement between the transparent substrate and the object is measured using signals from the photosensors. Indices for displaying positional information of a condenser lens provided on the transparent substrate and/or the first and second diffraction gratings are also provided on the transparent substrate. The optical apparatus is used within displacement-information measuring apparatus.

REFERENCES:
patent: 4385838 (1983-05-01), Nakazawa et al.
patent: 4755653 (1988-07-01), Levenson et al.
patent: 5214280 (1993-05-01), Rieder et al.
patent: 5283434 (1994-02-01), Ishizuka et al.

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