Optical annealing method for semiconductor layer and method for

Fishing – trapping – and vermin destroying

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148DIG4, H01L 21326, H01L 21306

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053127714

ABSTRACT:
An optical annealing method for a semiconductor layer provided on a substrate comprises irradiating a base member provided with a semiconductor layer and an absorbing layer for incoherent light across an insulating layer, with incoherent light followed by patterning the absorbing layer to form a gate electrode.

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R. Mukai et al., "Single crystalline Si islands on an amorphous insulating layer recrystallized by an indirect laser heating technique for three-dimensional integrated circuits," Applied Physics Letters, vol. 44, No. 10, May 1984, pp. 994-996.

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