Optical and optoelectronic articles

Optical waveguides – Having particular optical characteristic modifying chemical...

Reexamination Certificate

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C385S144000

Reexamination Certificate

active

07466892

ABSTRACT:
Optical and optoelectronic articles incorporating an amorphous diamond-like film are disclosed. Specifically, the invention includes optical or optoelectronic articles containing an amorphous diamond-like film overlying two or more proximate substrates, and to methods of making optical and optoelectronic articles. In certain implementations, the film comprises at least about 30 atomic percent carbon, from about 0 to about 50 atomic percent silicon, and from about 0 to about 50 atomic percent oxygen on a hydrogen-free basis. Another embodiment includes optical or optoelectronic articles containing an amorphous diamond-like film that is further coated with a metallic or polymeric material for attachment to a device package.

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Robertson, J., “Diamond-like Carbon”, Pure & Appl. Chem., vol. 66, No. 9, pp. 1789-1796, 1994.
Chapman, Brian, “Glow Discharge Processes”, John Wiley & Sons, New York, 1980, pp. 153.
David et al., “Plasma Deposition and Etching of Diamond-like Carbon Films”, AlChe Journal, Mar. 1991, vol. 37, No. 3, pp. 367-376.

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