Optical analyzer for measuring reflectivity of moving substrate

Details Optical analyzer for measuring reflectivity of moving substrate Optical analyzer for measuring reflectivity of moving substrate

1995-12-06

1998-06-16

Nelms, David C.

Optics: measuring and testing

Of light reflection

G01N 2155

Patent

active

057684715

ABSTRACT:
An optical analyzer measuring the reflectivity of a moving article in an in-line sputtering deposition system. The optical analyzer includes a light source which provides a light beam. Light is reflected from an optical coating of a moving article into a concentrator, which captures and directs the reflected light to a detector. The analyzer may be mounted in an evacuable chamber in which the end walls have openings to allow passage of the article.

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patent: 5530781 (1996-06-01), Takahashi

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