Optical alignment system in projection printing

Details Optical alignment system in projection printing Optical alignment system in projection printing

1978-12-29

1980-04-15

Hix, L. T.

Photocopying

Projection printing and copying cameras

Focus or magnification control

355 72, 356399, G03B 2752, G03B 2758, G01B 1127

Patent

active

041981596

ABSTRACT:
Apparatus for placing a resist coated semiconductor wafer surface in the image plane of an optical system by means of three drivers (e.g. actuated flexure joints), with non-contact sensing (e.g. air gauges) at each driver providing individual feedback thereto to move the wafer into the image plane.

REFERENCES:
patent: 3497705 (1970-02-01), Adler
patent: 3704657 (1972-12-01), Slikowski et al.
patent: 4068947 (1978-01-01), Buckley et al.
patent: 4084903 (1978-04-01), Pircher
patent: 4093378 (1978-06-01), Horr et al.

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